wavefront sensor_wavefront sensor supplier-Yucheng Light Sense

Domestically Developed

Innovating for Precision Measurement

In the context of rapid iteration in global semiconductor manufacturing, optical coating, and ultra-precision processing technologies, the industry's demand for multi-spectral compatible, ultra-high stability multi-band wavefront inspection technology is growing exponentially. Recently, Zernike Optical Technology, a deep-rooted player in the field of wave-front metrology, partnered with Yucheng Optical Sensing to mass-deliver FIS4-UHR sensors to an institute in Shanghai. This solution, with its outstanding adaptability to the visible light spectrum and nanometer-level detection stability, helped the client achieve critical technical breakthroughs in their project research, once again validating the FIS4's technical capability in addressing extreme inspection challenges.

This collaboration marks the mature application of Quadriwave Lateral Shearing Interferometry for wave-front metrology in highly complex scientific research scenarios. The FIS4 interferometer sensor not only met the client's need for simultaneous visible light band detection but also provided reliable data support for their nanometer-level research with its superior long-term detection stability.

The FIS4-UHR interferometer sensor (shown in Figure 1), delivered this time, is specifically designed to meet this client's unique requirements for visible light band inspection scenarios:

It offers a sampling resolution of up to 512×512 and a large sensor area of 13.3mm x 13.3mm. Simultaneously, it supports multi-wavelength visible light source adaptability, allowing for switching between conventional 532nm laser sources and multiple other standard wavelength modules like 485nm, 633nm, and 850nm. This overcomes the limitations of single-wavelength solutions in large-area, ultra-high precision inspection within the visible light band, providing greater flexibility.

(Figure 1) FIS4-UHR Interferometer Sensor

To ensure the equipment's efficient operation in the client's actual environment, the Zernike Optical Technology and Yucheng Optical Sensing teams also provided on-site technical support. They completed the sensor installation, wavelength calibration, and sensor operation training. The client expressed high satisfaction with this acceptance.

The system is equipped with the FIS4-UHR interferometer sensor measurement software. It can achieve Wavefront Error (WFE), Optical Aberrations (Zernike coefficients), and Modulation Transfer Function (MTF) through a single measurement.

The FIS4-UHR interferometer sensor measurement software covers the visible light band, balancing high resolution, high dynamic range, and nanometer-level phase sensitivity. It is also easy to operate, with a compact system that allows for quick alignment.

Due to its unique advantages, such as compactness, robustness, high temporal resolution, and compatibility with existing microscopic systems, the FIS4 interferometer sensor has become a powerful and versatile tool with wide application potential in both scientific research and industrial fields.

Initially used for traditional optical workshop inspection, including optical component testing, laser beam evaluation, and adaptive optics, the application range of the FIS4 interferometer sensor has since expanded to include biomedical imaging, nanoparticle localization, and the characterization of metasurfaces and temperature gradients.

Applications of the FIS4-UHR Wavefront Sensor

Laser Beam Wavefront Measurement Example

Optical System Calibration Measurement Example

Metasurface Wavefront Measurement Example

END

Zernike Optical Technology, in collaboration with Yucheng Optical Sensing, will continue expanding the wavelength coverage and technological frontiers of the FIS4 interferometer sensor. This allows us to offer more flexible inspection solutions to clients in sectors like semiconductor, aerospace, and biomedical.

We invite global partners to get in touch and jointly explore the endless possibilities of precision manufacturing!

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Successful Batch Delivery of FIS4-UHR

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