Ultra High Resolution wavefront detector

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FIS4-Ultra High Resolution

Four-wave Interferometric Sensor

Applicable: laser beam wavefront detection, adaptive optics, plane surface measurement, optical system calibration, optical window detection, optical plane, spherical surface measurement, surface roughness detection

Equipment advantages

◆ 100% domestically developed

◆ Ultra-high resolution of 415×415 (172225) phase points

◆ Single-path light self-interference, no reference light required

◆ Wide spectrum 400nm~900nm band

◆ 2nm RMS high phase resolution

◆ Extremely strong vibration resistance, no need for optical vibration isolation

◆ With laser interference fringe suppression design

◆ Support collimated beams and large NA converging beams

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Specially developed to help scientific research and high-precision industrial scenarios, higher resolution can have more details in wave front detection, ultra-high resolution of 512×512 (262144) phase points, wide spectral response of 400-900nm, 10 frame full resolution real-time 3D results display, For laser beam wavefront detection, adaptive optics, surface shape measurement, optical system calibration, optical window detection, optical spherical surface shape measurement, surface roughness detection, surface micro profile and so on to provide an ideal wavefront sensing measurement tool.

FIS4 UHR adopts the patented technology of random coding four-wave diffraction to achieve single-channel wavefront self-interference, interferes at the position of the rear image plane, has low requirements for the coherence of the light source, and does not need to shift the phase. Ordinary imaging systems can realize interference measurement, with ultra-high vibration resistance and ultra-high stability, and can achieve NM-level precision measurement without vibration isolation. Compared with microlens array, Hartmann sensor has more phase points, wider adaptive band range, wider dynamic range and lower price.

Main feature

Easy to adjust

Like an industrial camera

Quick to use

Single optical path, good vibration resistance

No vibration isolation required

Measurement can be done on an ordinary wooden table

Measurement

Repeatability better than

1/1000λ

Compatible

Infrared, ultraviolet

Visible light band

With high-speed camera

can achieve

ultra-high frame rate sampling

One-to-one

guidance

light path construction

Application examples

Laser beam wavefront detection optical path

Laser beam wavefront detection measurement example

Adaptive optics light path

Adaptive optics - wavefront detection response of Zernike modes

Optical plane surface measurement optical path

Optical plane surface measurement example

Optical spherical surface measurement optical path

Optical spherical surface measurement example

Optical window measurement light path

Optical Window Measurement Example

Wafer surface roughness detection optical path

Wafer surface roughness measurement example

Product specification

Light Source Type	Continuous laser, pulsed laser, LED, halogen lamp, and other broadband sources
Wavelength range	400nm~900nm
Target size	10.8mm×10.8mm
Spatial resolution	26μm
Sampling resolution	415×415
Absolute accuracy	15nmRMS
Phase resolution	≤2nmRMS
Dynamic range	≥160μm
Sampling rate	30fps
Real-time processing speed	5Hz（Full resolution）
Interface type	USB3.0
dimension	70mmx46.5mmx68.5mm
weigh	About 240g
Cooling Method	None

Professional software

◆ Friendly software interactive interface, displaying 3D morphology and contour map

◆ Output PV, RMS, POW, PSF, OTF, MTF and other numerical values

◆ Freely select the measurement area in circular or square shape, and freely adjust it after selection

◆ Real-time dynamic acquisition and display, convenient for dynamic observation of 3D waveform changes

◆ Can measure the height value curve by pulling the wire, calculate the numerical parameters such as regional roughness

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FIS4-Ultra High Resolution Four-wave Interferometric Sensor

Supports wide spectral range (400nm~900nm) Ultra-high resolution of 172225 phase points 2nm RMS high phase resolution

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CONTACT

7X24小时电话周一至周六 9:00-18:00

0757-6668-88268

Hangzhou Zernike Optical Technology Co., LTD
Full range of authorized dealers

Jiangsu Yucheng light sense technology Co., LTD

Email：

Dana@zernikeoptics.cn

电话：0757-666888268

传真：0757-666999368

公司地址：佛山市禅城区某某某路同某某莫大厦1208

备案号：粤ICP备100000000-1号

Record number: Su ICP for 2024068497

TEL：18012804887

EMAIL：Dana@zernikeoptics.cn

Address:：Nanjing University Science Park, 8 Yuanhua Road, Xianlin, Qixia District, Nanjing, Jiangsu Province

Dana

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