FIS4-Ultraviolet
Four-wave Interferometric Sensor
Application:Optical system aberration measurement, optical system calibration, plane (wafer) surface measurement, optical spherical surface measurement
◆ 100% domestically developed
◆ Single-path light self-interference, no reference light required
◆ UV spectrum 200nm~400nm band
◆ 2nm RMS high phase resolution
◆ Extremely strong vibration resistance, no need for optical vibration isolation
◆ With laser interference fringe suppression design
◆ Support collimated beams, high NA non-collimated beams
100% domestically developed, ultra-high resolution of 512×512 (262144) phase points, achieving position wavefront measurement from 200nm to 400nm, which can be used for optical system aberration measurement, optical system planning, plane surface measurement, optical spherical surface measurement, etc.
FIS4 UV combines the patented random coded four-wave conductive technology with wavelength light, and interferes at the position of the eyebrow image plane. It has low requirements for light source coherence, dissipative phase shift, and layout imaging system to achieve real-time wavefront measurement, ultra-high vibration resistance, ultra-high stability, and vibration elimination to achieve nanometer-level precision measurement.
Easy to adjust
Like an industrial camera
Quick to use
Single optical path, good vibration resistance
No vibration isolation required
Measurement can be done on an ordinary wooden table
Measurement
Repeatability better than
1/1000λ
Compatible
Infrared, ultraviolet
Visible light band
With high-speed camera
can achieve
ultra-high frame rate sampling
One-to-one
guidance
light path construction
Laser beam wavefront detection optical path
Laser beam wavefront detection measurement example
Optical system aberration measurement optical path
Optical system aberration measurement example
Microscopic etching profile measurement optical path
Defective sample 1#-114 engraved line
Adaptive optics light path
Adaptive optics - wavefront detection response of Zernike modes
Optical system calibration light path
Optical System Calibration Measurement Example
Metasurface wavefront measurement detection optical path
Metasurface Wavefront Measurement Example
|
Light Source Type |
Continuous laser, pulsed laser, LED, halogen lamp, and other broadband sources |
|
Wavelength range |
200nm~400nm |
|
Target size |
13.3mm×13.3mm |
|
Spatial resolution |
26μm |
|
Sampling resolution |
512×512 |
|
Absolute accuracy |
10nmRMS |
|
Phase resolution |
≤2nmRMS |
|
Dynamic range |
≥90μm |
|
Sampling rate |
32fps |
|
Real-time processing speed |
5Hz（Full resolution） |
|
Interface type |
USB3.0 |
|
dimension |
70mm×46.5mm×68.5mm |
|
weigh |
About 240g |
|
Cooling Method |
None |
◆ Friendly software interactive interface, displaying 3D morphology and contour map
◆ Output PV, RMS, POW, PSF, OTF, MTF and other numerical values
◆ Freely select the measurement area in circular or square shape, and freely adjust it after selection
◆ Real-time dynamic acquisition and display, convenient for dynamic observation of 3D waveform changes
◆ Can measure the height value curve by pulling the wire, calculate the numerical parameters such as regional roughness
INQUIRY
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CONTACT
7X24小时电话 周一至周六 9:00-18:00
0757-6668-88268
Hangzhou Zernike Optical Technology Co., LTD
Full range of authorized dealers
Jiangsu Yucheng light sense technology Co., LTD
Email：
电话：0757-666888268
传真：0757-666999368
公司地址：佛山市禅城区某某某路同某某莫大厦1208
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©2024 Copyright Jiangsu Yucheng Light Sense Technology Co., LTD
Record number: Su ICP for 2024068497
TEL：18012804887
EMAIL：Dana@zernikeoptics.cn
Address:：Nanjing University Science Park, 8 Yuanhua Road, Xianlin, Qixia District, Nanjing, Jiangsu Province
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