FIS4-Near-Infrared
Four-wave Interferometric Sensor
Application:Optical system aberration measurement, optical system calibration, plane (wafer) surface measurement, optical spherical surface measurement
◆ 100% domestically developed
◆ Single-path light self-interference, no reference light required
◆ Wide spectrum 900nm~1200nm band
◆ 2nm RMS high phase resolution
◆ Large dynamic range up to 240μm
◆ Extremely strong vibration resistance, no need for optical vibration isolation
◆ With laser interference fringe suppression design
◆ Support collimated beams and large NA converging beams
100% domestically developed, with ultra-high resolution of 512×512 (262144) phase points, it can achieve high-precision wavefront measurement in the 900nm to 1200nm band, which can be used for optical system aberration measurement, optical system calibration, material internal lattice distribution measurement, metasurface, superlens wavefront measurement, etc.
FIS4 NIR combines the patented random coded four-wave diffraction technology with an infrared camera to interfere at the rear image plane position. It has low requirements for light source coherence and does not require phase shifting. Ordinary imaging systems can achieve interferometric measurement. It has ultra-high vibration resistance and ultra-high stability, and can achieve nm-level precision measurement without vibration isolation.
Single optical path, good vibration resistance
No vibration isolation required
Measurement can be done on an ordinary wooden table
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Light Source Type |
Continuous laser, pulsed laser, LED, halogen lamp, and other broadband sources |
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Wavelength range |
900nm~1200nm |
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Target size |
13.3mm×13.3mm |
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Spatial resolution |
26μm |
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Sampling resolution |
512×512 |
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Absolute accuracy |
20nmRMS |
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Phase resolution |
≤2nmRMS |
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Dynamic range |
≥260μm |
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Sampling rate |
32fps |
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Real-time processing speed |
5Hz(Full resolution) |
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Interface type |
USB3.0 |
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dimension |
70mm×46.5mm×68.5mm |
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weigh |
About 240g |
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Cooling Method |
None |
◆ Friendly software interactive interface, displaying 3D morphology and contour map
◆ Output PV, RMS, POW, PSF, OTF, MTF and other numerical values
◆ Freely select the measurement area in circular or square shape, and freely adjust it after selection
◆ Real-time dynamic acquisition and display, convenient for dynamic observation of 3D waveform changes
◆ Can measure the height value curve by pulling the wire, calculate the numerical parameters such as regional roughness
