How does FIS4 wavefront sensor realize "full parameter, high precision" optical detection?

In the field of precision optical manufacturing, traditional testing equipment can usually only provide single parameters. Since 2006, Professor Yang Yongying's team from Zhejiang University has introduced radial shearing wavefront testing. After 17 years of dedicated research and development, Professor Yang Yongying's team has launched the wide-spectrum FIS4 series Wavefront sensor. Through innovative algorithms, in 2023, it achieved stable full-dimensional detection from aberration analysis to imaging quality evaluation.

I. Aberration Diagnosis: Accurate Modeling with 64-Term Zernike Polynomials

The FIS4 Wavefront sensor can decompose wavefront distortion into 64 Zernike coefficients, far exceeding the 36-term analysis capability of conventional equipment.

II. Dynamic Wavefront Monitoring: 10Hz Full-parameter Refresh

Real-time bimodal output: wavefront gradient map, locating the source of aberration

Evaluate the uniformity of the system transmittance and the efficiency of light energy management based on the relative light intensity distribution

Phase map (PV/RMS) evaluates the overall surface shape, PV repeatability

III. Full-Link Evaluation of Imaging Quality

1. PSF (Point Spread Function): Three-dimensional modeling of Strehl Ratio, supporting the simulation of PSF evolution in scenarios such as defocus and astigmatism.

2. MTF (Modulation Transfer Function): The spatial frequency covers 0 - 500 lp/mm, and it is related to the Nyquist frequency to evaluate the ultimate resolution of the sensor.

3. PSD (Power Spectral Density): Analysis of high-frequency errors on the surface (1 - 100 μm band), a key indicator for optimizing the wafer polishing process.

The 'Parameter Matrix' detection system of the FIS4 Wavefront Sensor is redefining optical quality inspection standards. Whether it's the λ/100 precision requirement for EUV lithography machines or the on-orbit calibration of space telescopes, this software system can provide reliable data support.

Jingnaike Optoelectronics, together with Yucheng Optical Sensing, will continue to expand the wavelength coverage and technical boundaries of the FIS4 Four-Wave Interferometric Sensor, providing more flexible detection solutions for customers in semiconductor, aerospace, biomedical and other fields. We sincerely invite global partners to inquire and explore the infinite possibilities of precision manufacturing together! For detailed information, please visit the official website to contact customer service or sales consultants.We hope to create a higher-quality and more efficient user experience for you.