The FIS4 wavefront sensor provides a comprehensive solution for optical measurement.

Since 2006, Professor Yang Yongying's team at Zhejiang University has been developing radial shear wavefront detection. After 17 years of dedicated research, they have launched the wide-spectrum FIS4 series wavefront sensors. Employing common-path interferometry, these sensors offer enhanced environmental adaptability and measurement stability, providing a superior solution for high-precision measurements.

The core advantage lies in its ultra-high precision detection capability: using a 512×512 ultra-high resolution sensor, it can acquire 260,000 phase points per frame, dozens of times more than traditional Hartmann sensors (typically only around 10,000 points), clearly revealing nanoscale wavefront details. Combined with the ultra-high measurement accuracy of 2nm RMS, FIS4 can accurately capture subtle features such as optical components, lasers, and nanoscale wavefront distortion. The FIS4 wavefront sensor has irreplaceable practical value in high-end fields such as lithography mirror assembly inspection, high-energy laser thermal distortion monitoring, and ultra-precision optical processing.

FIS4 wavefront sensor VS Hartmann sensor

✅ 1. Phase Resolution: 260,000 vs 10,000

FIS4 Wavefront Sensor: 512×512 ultra-high resolution (260,000+ phase points), dozens of times higher than Hartmann, enabling more precise measurement of high-frequency information distribution!

Hartmann: Typically 32×32~128×128 sampling points (around 10,000), resulting in significant loss of detail.

✅ 2. Spatial Resolution: 13.8μm vs 100μm

FIS4 Wavefront Sensor: Utilizes optical etching technology, achieving a minimum spatial resolution of 13.8μm. This smaller spatial resolution ensures accurate phase measurements at higher frequencies.

Hartmann: Limited by manufacturing and measurement precision, the size of the microlens array is generally greater than 100μm, making it difficult to achieve a spatial resolution below 100μm.

✅ 3. Measurement Accuracy: 2nm vs 10nm

FIS4 Wavefront Sensor: Ensures high-precision measurement results through high-precision photolithography, achieving an ultra-high accuracy of 2 nm RMS (1/50,000th the thickness of a human hair). It can easily detect nanometer-level surface shape errors, laser wavefront distortion, etc.

Hartmann: Limited by lens focusing spot positioning, lens processing errors affect measurement accuracy, limiting it to only 10-50nm RMS.

✅ 4. Dynamic Range: 200μm vs 10μm

FIS4 Wavefront Sensor: Employs continuous etching, enabling ultra-wide dynamic range measurements, up to 200μm, ensuring compatibility with various measurement scenarios.

Hartmann: Limited by the lens focusing spot positioning area, achieving a dynamic range greater than 10μm is difficult.

The FIS4 wavefront sensor offers comprehensive solutions for optical measurement with its nanometer-level precision, strong environmental adaptability, and intelligent analysis capabilities. It simultaneously performs high-precision wavefront measurement, spot analysis, and MTF measurement, providing reliable data support for optical measurements and effectively improving processing accuracy and system performance. It can be widely used in laser beam analysis, optical system image quality measurement, surface shape measurement, micro/nano profile measurement, and quantitative phase analysis of biological cells.

Large dynamic range measurement

3D Imaging Measurement of Biological Cells

Jingnai Optoelectronics, in partnership with Yucheng Optoelectronics, will continue to expand the wavelength coverage and technological boundaries of its FIS4 Four-Wave Interferometric Sensor, providing more flexible detection solutions for customers in the semiconductor, aerospace, and biomedical industries. We sincerely invite global partners to inquire and jointly explore the infinite possibilities of precision manufacturing! For detailed information, please visit our website and contact customer service or a sales consultant. We hope to create a better and faster user experience for you.