FIS4-HR-W: The Path to Technological Breakthrough for Domestic Self-developed High-Resolution Wavefront Sensor

In fields such as semiconductor wafer manufacturing, high-energy laser research and development, and ultra-precision optical processing, 'measurement' is the key that determines the upper limit of 'manufacturing'. However, for a long time, high-end wavefront measurement technology (such as Hartmann sensors) has been able to meet some needs, but it faces challenges such as strong environmental dependence, the contradiction between resolution and dynamic range, and overseas dependence on core technologies. Professor Yang Yongying's team at Zhejiang University has been deeply involved in the field of wavefront detection. After nearly 20 years of technological accumulation, they have launched the 100% domestically developed FIS4-HR-W high-resolution wavefront sensor.

This sensor differs from traditional microlens arrays (Shack-Hartmann) or common interferometers that require reference mirrors. Its core breakthrough lies in the Random Encoding Hybrid Grating (REHG) technology. Unlike traditional microlens arrays or interferometers that require reference mirrors, REHG achieves imaging through single-channel self-interference of the measured wavefront, enabling common-path interference. This results in an extremely stable optical path and excellent anti-vibration performance. It is widely used in scenarios such as beam wavefront detection, adaptive optics, planar surface shape measurement, optical system calibration, optical window plate detection, and surface roughness detection.

FIS4-HR-W is equipped with self-developed analysis software, featuring a user-friendly main interface. It enables real-time dynamic acquisition and display of 3D topography and contour maps, supports free adjustment of circular or square selection areas, and allows for line drawing to measure height curves and regional roughness. With a single click, it outputs core parameters such as PV, RMS, POW, PSF, OTF, and MTF. It possesses the ability to fit 64 Zernike aberrations, enabling the entire process analysis from wavefront acquisition to imaging quality evaluation without the need for additional optical software.

In the field of precision manufacturing, measurement capability determines the upper limit of manufacturing. The FIS4-HR-W high-resolution wavefront sensor, leveraging the innovative breakthroughs of REHG technology, pushes the technological boundaries of domestically produced precision optical instruments to new heights. It is not just an instrument, but also a significant step in the implementation of the self-controllable strategy in the field of precision manufacturing.