FIS4-DPHASE-1
Four-Wave Dynamic Interferometer
Application: High-precision surface detection of spherical and flat optical components
◆ Utilizes a combined dual interference system: common-path interference is stable, no phase shifting is required, and adjustment is convenient, suitable for high-precision and stable measurement of large-aperture and long optical path
◆ Measurement resolution 2 nm
◆ Strong measurement repeatability ≤1/1000λ (633nm band)
◆ No vibration isolation is required, stability & vibration resistance is super strong (suitable for high-precision detection in factories)
◆ Equipped with a five-dimensional adjustment frame, adaptable to various posture adjustments, easy to operate
◆ Adapt to a spherical mirror with different F numbers: F1, F3, F5 … …
◆ Real-time display of output wavefront PV value, RMS value, Zernike coefficient … …
FIS4 four-wave dynamic interferometer is based on the principle of common path four-wave lateral shearing interference. Universal lens; strong vibration resistance, no need for a separate vibration isolation platform; no phase shifting, easy to adjust; high cost performance; 100% domestically developed, high precision! High vibration resistance! Real-time observation!
The optical path of dynamic interferometer plane measurement is shown in the figure：
The laser is collimated and expanded, and then irradiated onto the plane to be inspected through a beam splitter and a beam expander. The light beam reflected back from the plane to be inspected carries the surface information of the plane to be inspected, passes through a beam reducer, and enters the FIS4 sensor for surface information demodulation.
Spherical dynamic interferometer, using a combined dual interferometer system ：
（a）FIS4 four-wave shearing interferometry system, laser collimation and beam expansion, through the beam splitter and standard aplanatic mirror, irradiate the spherical surface to be tested, the reflected beam carries the surface information of the spherical surface to be tested, enters the FIS4 sensor for surface information demodulation, and avoids the influence of external disturbance on the tested optical path in double beam interference such as Fizeau and Twyman Green.
（b）T.M. Green spherical interference adjustment system.
◆ The entire system is placed on a five-dimensional adjustment frame through a slider and can be fixed by a locking handwheel, making it convenient for users to adjust the posture during use.
◆ The five-dimensional adjustment frame of the interferometer is shown in the figure, which includes an X-direction handwheel, a Y-direction handwheel, a Z-direction lifting handwheel, a yaw handwheel, and a pitch handwheel, which can adjust the X direction, Y direction, Z direction, yaw angle, and pitch angle of the interferometer respectively.
Optical plane surface measurement example
Optical spherical surface measurement example
Optical system calibration light path
Optical System Calibration Measurement Example
Optical window measurement light path
Optical Window Measurement Example
|
Measurement method |
Common path single optical path test |
|
Light source band |
632.8±1nm |
|
Output phase resolution |
512 x 512 |
|
Standard Aplanatic Lens |
F1\F3\F5\F7,……,32（Optional according to needs） |
|
dynamic range (μm) |
＞250 |
|
Accuracy PV value (λ) |
≤1/20λ |
|
RMS measurement repeatability (λ) |
≤1/1000λ |
|
Measurement resolution (nm) |
2 |
|
Real-time display frame rate (Hz) |
10 |
|
Sensors are shipped with |
image processing server |
|
Equipped with processing software |
The "Four-wavefront Shearing Wavefront Reconstruction Software" can display the output wavefront in real time.：PV value、RMS value、POWER value |
◆ Friendly software interactive interface, displaying 3D morphology and contour map
◆ Output PV, RMS, POW, PSF, OTF, MTF and other numerical values
◆ Freely select the measurement area in circular or square shape, and freely adjust it after selection
◆ Real-time dynamic acquisition and display, convenient for dynamic observation of 3D waveform changes
◆ Can measure the height value curve by pulling the wire, calculate the numerical parameters such as regional roughness
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Hangzhou Zernike Optical Technology Co., LTD
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