FIS4-High Resolution
Four-wave Interferometric Sensor (Refrigerated version)
Applicable: beam wavefront detection, adaptive optics, plane surface measurement, optical system calibration, optical window detection,
optical plane, spherical surface measurement, surface roughness detection
◆ 100% domestically developed
◆ Single-path light self-interference, no reference mirror required
◆ Wide spectrum 400nm~1100nm band
◆ 2nm RMS high phase resolution
◆ Strong anti-vibration performance, no need for optical vibration isolation
◆ Simple and fast interference light path construction
◆ Support collimated beams and large NA converging beams
Developed for convenient interferometry in industry and research. High resolution of 300×300 (90,000) phase points, 400-900nm wide spectral response, 10 frame full resolution real-time 3D result display, For laser beam wavefront detection, adaptive optics, optical system calibration, optical window detection, optical surface shape, spherical surface shape measurement, surface roughness, surface micro profile detection and so on to provide an ideal wavefront sensing measurement tool.
FIS4 HR-C uses the patented technology of random coded four-wave diffraction to realize self-interference in front of a single measured wave, and interferes at the position of the rear image plane. The interference measurement can be realized by means of ordinary imaging system with low requirement on the coherence of light source and no need of phase shifting. It has ultra-high vibration resistance and ultra-high stability, and can achieve NM-level precision measurement without vibration isolation. Compared with microlens array Hartman sensor, it has more high-resolution phase points, wider adaptive band range, larger dynamic range, and better cost performance.
Single optical path, good vibration resistance
No vibration isolation required
Measurement can be done on an ordinary wooden table
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Light Source Type |
LED, halogen lamp and other wide spectrum light sources |
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Wavelength range |
400~1100nm(for white light) |
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Target size |
7.07mm×7.07mm |
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Spatial resolution |
23.6μm |
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Sampling resolution |
300×300 |
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Absolute accuracy |
10nmRMS |
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Phase resolution |
≤2nmRMS |
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Dynamic range |
≥80μm |
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Sampling rate |
24fps |
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Real-time processing speed |
10Hz(Full resolution) |
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Interface type |
Network interface |
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dimension |
70mmx56.5mmx68.5mm |
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weigh |
About 500g |
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Cooling Method |
Liquid cooling radiator
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◆ Friendly software interactive interface, displaying 3D morphology and contour map
◆ Output PV, RMS, POW, PSF, OTF, MTF and other numerical values
◆ Freely select the measurement area in circular or square shape, and freely adjust it after selection
◆ Real-time dynamic acquisition and display, convenient for dynamic observation of 3D waveform changes
◆ Can measure the height value curve by pulling the wire, calculate the numerical parameters such as regional roughness
