FIS4-Ultra High-speed
Four-wave Interferometric Sensor
Wide spectral range (400nm~1100nm)
Ultra high resolution of 176,400 phase points
107 frame high speed sampling
Specially developed for wave front analysis of high-speed industrial, national defense and scientific research scenes such as fly shooting and flow field, ultra-high resolution of 420×420 (176400) phase points, wide spectral response of 400-1100nm, high-speed sampling of 107 frames, It provides an ideal wavefront sensing tool for wafer surface roughness measurement, silicon base, glass substrate microstructure measurement, aerooptics, high-speed flow field, gas plasma density measurement, etc.
FIS4 HS combines the patented technology of random coding four-wave diffraction with a high-speed camera to interfere at the position of the rear image plane, and has low requirements for the coherence of the light source without phase shifting. Ordinary imaging systems can realize interferometry, with ultra-high vibration resistance, ultra-high stability, ultra-high speed imaging, and NM-level precision measurement without vibration isolation.
◆ Up to 107fps sampling frame rate
◆ Single light interference, no reference light
◆ Wide spectrum 400nm~1100nm band
◆ 2nm RMS high phase resolution
◆ Strong vibration resistance, no optical vibration isolation
◆ Like imaging, simple and fast light path construction
◆ Support collimation beam, large NA convergence beam
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Wavelength range |
400nm~1100nm |
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Target size |
10.24mm×10.24mm |
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Spatial resolution |
24.4μm |
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Sampling resolution |
420×420(176400pixel) |
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Phase resolution |
<2nmRMS |
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Absolute accuracy |
10nmRMS |
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Dynamic range |
132μm(210λ) |
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Sampling rate |
107fps |
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Real-time processing speed |
10Hz(Full resolution)Supports delayed batch processing |
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Interface type |
GIGE |
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dimension |
56.5mm×43mm×41.5mm |
|
weight |
about 120g |
