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Real-time monitoring and detection of nanoscale surface deformation

Metasurface hyperlenses utilize subwavelength scale structures to achieve functions that are not possible with conventional optics, such as negative refraction and super-resolution imaging. The performance of these devices depends on their complex surface topography at the micro - and nano-scale, so accurate measurement of these topography during design and manufacturing is critical. The FIS4 four-wave interference sensor enables this precise measurement with white light interferometry technology, which supports real-time monitoring and is capable of detecting surface deformation at the nanoscale, thus providing important technical support for the production and quality control of metasurface hyperlenses.

Measurement advantage

Complete measurement with a single frame

 

◆ Wave front distribution

◆ Strength distribution

◆ Beam parameter analysis

High resolution

 

◆ Up to 512×512 phase sampling points

◆ High dynamic range

◆ Nanoscale sensitivity

Easy to adjust integration

 

◆ Small and compact

◆ Support parallel and convergent beams

◆ Super vibration resistance

Measurement example

▎Metasurface wavefront measurement

      

▎Metasurface wavefront measurement

Measurement demonstration

Measurement example

▎Ultra-lens wavefront measurement of optical path

      

▎Hyperlens wavefront measurement

Measurement demonstration

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Near-ultraviolet spectrum (200nm~400nm) Ultra-high resolution of 262144 phase points Absolute accuracy of 10nmRMS

FIS4-Near-Infrared   Four-wave Interferometric Sensor

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Near-infrared spectrum (900nm~1200nm) Super high resolution of 262144 phase points Large dynamic range up to 240μm

FIS4-High Resolution Four-wave Interferometric Sensor

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FIS4-Ultra High Resolution Four-wave Interferometric Sensor

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Supports wide spectral range (400nm~900nm) Ultra-high resolution of 172225 phase points 2nm RMS high phase resolution

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CONTACT

 

7X24小时电话   周一至周六 9:00-18:00

0757-6668-88268

Hangzhou Zernike Optical Technology Co., LTD
Full range of authorized dealers   

Jiangsu Yucheng light sense technology Co., LTD

Email：

Dana@zernikeoptics.cn


电话：0757-666888268

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©2024 Copyright Jiangsu Yucheng Light Sense Technology Co., LTD  

Record number: Su ICP for 2024068497

TEL：18012804887         

EMAIL：Dana@zernikeoptics.cn

Address:：Nanjing University Science Park, 8 Yuanhua Road, Xianlin, Qixia District, Nanjing, Jiangsu Province


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