Subtle defects and irregularities on the wafer surface can be identified and quantified

FIS4 four-wave transverse shear interference technology can be applied to the surface roughness detection of optical components, and has outstanding advantages:

1. High precision measurement: FIS4 technology provides extremely high measurement accuracy, which is essential for the performance of optical components. It can measure tiny irregularities on the surface of optical elements that may affect the imaging quality or beam transmission characteristics of the optical system.

2. Non-contact inspection: As a non-contact measurement technology, FIS4 avoids any physical damage that may be caused to the surface of the optical component, which is particularly important for the production of high-quality optical components.

3. Real-time monitoring and feedback: FIS4 technology can be integrated into the production line of optical processing to achieve real-time monitoring of the surface roughness of optical components. This allows for immediate adjustments in the production process to ensure product quality.

4. Vibration resistance: FIS4 technology has good vibration resistance, which means that it can operate stably in the production environment without affecting the measurement results due to mechanical vibration.

5. Wavefront reconstruction ability: Through FIS4 technology, the wavefront information of the optical surface can be reconstructed, which is of great significance for understanding the optical performance of optical components in actual use.

6. Automated data processing: Combined with modern image processing and data analysis software, FIS4 technology can automate data acquisition and processing, providing users with easy-to-understand surface roughness parameters.

In the manufacturing and quality control process of optical components, the application of FIS4 technology can significantly improve production efficiency and product quality. It can help manufacturers identify and correct problems in the production process, reduce scrap rates, and ensure that each optical component meets its design specifications. In addition, by performing precise roughness analysis of optical component surfaces, FIS4 technology can help researchers and engineers better understand the physical and chemical properties of material surfaces and how these properties affect optical properties.

Measurement advantage

Complete measurement with a single frame

 

◆ Roughness measurement

◆ Support online measurement

◆ Support white light

High resolution

 

◆ Up to 512×512 phase sampling points

◆ High dynamic range

◆ Nanoscale sensitivity

Easy to adjust integration

 

◆ Small and compact

◆ Support parallel and convergent beams

◆ Super vibration resistance

Measurement example

Optical component surface roughness detection optical path

      

Transparent quartz glass

Measurement demonstration

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